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FABRICATION OF SILICON TIPS BY ONE STEP WET CHEMICAL ETCHING
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    • FABRICATION OF SILICON TIPS BY ONE STEP WET CHEMICAL ETCHING

    • Chinese Journal of Luminescence   Vol. 20, Issue 1, Pages: 81-85(1999)

    • Received：24 June 1998，

      Published：28 February 1999

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  • Wang Weibiao, Jin Changchun, Liang Jingqiu, Jiang Jinxiu, Liu Naikang, Yao Jinsong, Zhao Haifeng, Wang Yongzhen, Fan Xiwu. FABRICATION OF SILICON TIPS BY ONE STEP WET CHEMICAL ETCHING[J]. Chinese Journal of Luminescence, 1999,20(1): 81-85 DOI：

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Yao Jinsong
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Fan Xiwu
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Wang Yongzhen
Zhao Haifeng
Jin Changcun
Wang Weibiao

Related Institution

Changchun Institute of Physics, Chinese Academy of Sciences, Changchun 130021
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