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THE COMPARISON OF Si-TIP FABRICATION METHODS BETWEEN DRY ETCHING AND WET ETCHING
更新时间：2020-08-11

    • THE COMPARISON OF Si-TIP FABRICATION METHODS BETWEEN DRY ETCHING AND WET ETCHING

    • Chinese Journal of Luminescence   Vol. 19, Issue 3, Pages: 272-274(1998)

    • Published：30 August 1998

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  • Wang Weibiao, Jin Changcun, Zhao Haifeng, Wang Yongzhen, Yin Xiuhua, Fan Xiwu, Liang Jingqiu, Yao Jinsong. THE COMPARISON OF Si-TIP FABRICATION METHODS BETWEEN DRY ETCHING AND WET ETCHING[J]. Chinese Journal of Luminescence, 1998,19(3): 272-274 DOI：

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Jiang Jinxiu
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Related Institution

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