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STUDY ON PROPERTIES OF DIELECTRIC FILM GROWN BY PECVD
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    • STUDY ON PROPERTIES OF DIELECTRIC FILM GROWN BY PECVD

    • Chinese Journal of Luminescence   Vol. 17, Issue 3, Pages: 230-234(1996)
    • Received:05 December 1995

      Published:30 August 1996

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  • Cui Xiangtian, Chu Zhensheng, Gao Pengtao, Wang Zhijun, Chang Wei, Zheng Xifeng, Meng Xianxin. STUDY ON PROPERTIES OF DIELECTRIC FILM GROWN BY PECVD[J]. Chinese Journal of Luminescence, 1996,17(3): 230-234 DOI:

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