A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ
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A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ
Chinese Journal of LuminescenceVol. 16, Issue 1, Pages: 78-81(1995)
作者机构:
中国科学院长春物理研究所 长春,130021
作者简介:
基金信息:
DOI:
CLC:
Published:28 February 1995,
Received:14 April 1994,
稿件说明:
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LU PING, FAN JUNQING, XU CHENGJIE, et al. A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ. [J]. Chinese journal of luminescence, 1995, 16(1): 78-81.
DOI:
LU PING, FAN JUNQING, XU CHENGJIE, et al. A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ. [J]. Chinese journal of luminescence, 1995, 16(1): 78-81.DOI:
A STUDY FOR OPTICAL WAVEGUIDES FABRICATED BY ION IMPLANTATION IN FUSED QUARTZ
The low-loss single mode waveguides in fused quartz substrate were fabricated by nitrogen and boron ion implantation.The maximum index and half width of refractive index profile is 1.48 and 0.5 μm
respectively.The waveguide loss is less than 0.1 dB/cm.