EPITAXIAL GROWTH OF ZnSe LAYERS BY METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION (MOCVD)
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EPITAXIAL GROWTH OF ZnSe LAYERS BY METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION (MOCVD)
Chinese Journal of LuminescenceVol. 7, Issue 4, Pages: 383-392(1986)
作者机构:
1. 中国科学院长春物理研究所
2. 英国曼彻斯特大学理工学院化学系
作者简介:
基金信息:
DOI:
CLC:
Received:10 July 1986,
Published:30 November 1986
稿件说明:
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范广涵, J. I. Davies, J. O. Williams. ZnSe单晶薄膜的MOCVD法生长[J]. 发光学报, 1986,7(4): 383-392
Fan Guanghan, J. I. Davies J. O. Williams. EPITAXIAL GROWTH OF ZnSe LAYERS BY METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION (MOCVD)[J]. Chinese Journal of Luminescence, 1986,7(4): 383-392
范广涵, J. I. Davies, J. O. Williams. ZnSe单晶薄膜的MOCVD法生长[J]. 发光学报, 1986,7(4): 383-392DOI:
Fan Guanghan, J. I. Davies J. O. Williams. EPITAXIAL GROWTH OF ZnSe LAYERS BY METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION (MOCVD)[J]. Chinese Journal of Luminescence, 1986,7(4): 383-392DOI:
EPITAXIAL GROWTH OF ZnSe LAYERS BY METAL-ORGANIC CHEMICAL VAPOUR DEPOSITION (MOCVD)
This paper describes the growth mechanism and the characteristics of ZnSe epilayers by Metal-Organic Chemical Vapour Deposition (MOCVD) at atmospheric pressure. Gas flow patterns
entrance effects and boundary layers within reactors have been investigated.The experimental techniques employed are TiO
2
smoke trace and it’s photogrammetry. The results are analysed in terms of accepted simplified theories of gas flow dynamics involving a group of dimensionless number-Re
Ra and Gr/Re
2
. The de-pendance of the stagnant layer thickness (δ) on the distance along substrate holder (
x
)
the gas velocity (
U
∞
) and the temperature (
T
) was experimentally observed.It tallys with the Berkman’s typical expression for the boundary layer thickness.The growth rate (
G
) has been studied as a function of distance along (
x
) and across (
z
) the susceptor. It is independent of the temperature between 450-530℃ for Diethylzinc (DEZ)and 280-390℃ for Dimethylzinc (DMZ) respectively. This shows that the deposition is controlled by the diffusion of reactants across the stagnant layer.