Li Xi-qiang, Sun Bing-yu. INVESTIGATION OF A1<sub>2</sub>O<sub>3</sub> ANTIREFLECTIVE COATING FOR GaAlAs HIGH SPEED LEDs[J]. Chinese Journal of Luminescence, 1983,4(1): 52-60
Li Xi-qiang, Sun Bing-yu. INVESTIGATION OF A1<sub>2</sub>O<sub>3</sub> ANTIREFLECTIVE COATING FOR GaAlAs HIGH SPEED LEDs[J]. Chinese Journal of Luminescence, 1983,4(1): 52-60DOI:
INVESTIGATION OF A12O3 ANTIREFLECTIVE COATING FOR GaAlAs HIGH SPEED LEDs
In this paper the effect of antireflective coating (ARC) on the emitting facet on the light power output of edge emitting diode is reported.In high speed GaAs/GaAlAs DH-LEDs with sputtered A1
2
O
3
as AR coating on the front emitting facet
a remarkable increase in light power output has been achieved. The fabricated LEDs have two types of structure:normal edge emitter and edge emitter with optical waveguide structure.A conventional rf sputtering equipment with the source power of 3kW at 13.5 MC was used in preparing the A1
2
O
3
AR coating (refractive index 1.65~1.7). A high purity A1
2
O
3
disk was employed as a target.Before sputtering the high-purity Ar gas was further purified by passing it through molecular sieve 5A and hot Ti coils.The light power output of a normal edge emitter as a function of current density is plotted in Fig.3.At a driving current density of 4kA/cm
2
the light power increases from 370nW for the uncoated LED to 495uW for the same diode coated with~1890Å A1
2
O
3
.This corresponds to a light-power increase of~34%.